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Multi-functional ECR plasma sputtering system for preparing amorphous carbon and Al-O-Si films
  • ISSN号：0257-8972
  • 期刊名称：Surface and Coatings Technology
  • 时间：0
  • 页码：1963-1970
  • 相关项目：ECR纳米表面的极端制造原理与方法研究
作者： Fan, Xue|Diao, Dongfeng|Wang, Kai|Wang, Chao|
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ECR纳米表面的极端制造原理与方法研究
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