中文摘要：

利用自组装和喷覆技术,在单晶硅（Si）表面制备了N-3-（三甲氧基硅烷基）丙基乙二胺（DA）-月桂酰氯（LA）-1-十二烷基-3-甲基咪唑六氟磷酸盐离子液体（ILs）双层自组装分子/离子液体复合润滑薄膜（DA-LA-ILs）.采用接触角测量仪、傅里叶变换红外光谱仪（FTIR）和原子力显微镜（AFM）对复合润滑薄膜进行了润湿性能、分子组分、微观形貌和微尺度黏附行为的研究;利用球-盘摩擦磨损试验机研究了该薄膜的摩擦学性能.结果表明：经DA-LA-ILs复合润滑薄膜改性后,有效改善了Si表面的微观黏着性能;同时,相较于DA-LA双层自组装分子膜改性的Si表面和直接由ILs修饰的Si表面,该复合润滑薄膜具有良好的宏观减摩抗磨性能.研究为DA-LA-ILs复合润滑薄膜应用于微机电系统,降低微接触表面的黏着并提高耐磨性能提供了理论依据和试验基础.

英文摘要：

Combining self-assembly technology and spray painting method, the dual self-assembled monolayers/Ionic liquids composite lubrication films（DA-LA-ILs）, which including N-[3-（Trimethoxysilyl）propyl] ethylenediamine（DA）,Lauroyl Chloricle（LA） and 1-Dodecyl-3-Methylimidazolium Hexafluorophosphate Ionic liquids（ILS）, were prepared on silicon（Si） substrates. The water contact angle meter, Fourier transform infrared spectroscopy and atomic force microscope were used to characterize the wettability the molecular components, microscopic morphologies and microscale adhesion behaviors of the films. The tribological properties of the films were analyzed by a ball-on-plate tribolometer. The investigation reveals that the adhesion properties of Si surface were effectively improved after being modified by the DA-LA-ILs composite lubrication film. Meanwhile, compared with the DA-LA dual sel-assembled monolayers and ILs modified Si substrate, the composite lubricating film showed the best friction-reduction and wearresistance properties. The results provide theoretical foundation and experimental basis for the applications of DA-LAILs composite lubricating film to reduce the adhesion between micro surfaces and improved wear resistance in microelectro mechanical systems.