中文摘要：

Al在ZrN薄膜中的存在形式与Al含量密切相关，由此导致ZrAlN薄膜的韧性改变。本文发现了一定成分的ZrAlN薄膜同时具备高硬度和高韧性的现象。采用磁控溅射技术在钛合金和单晶si上沉积不同Al含量的ZrAlN薄膜，测试了硬度（H）、弹性模量（E）和断裂韧性（KIC），表征了微观组织、相结构，阐明了性能变化机理。采用纳米压入仪测试H和E；压人法及小能量多冲法评价了KIC；采用场发射扫描电镜（FESEM）观察截面形貌，X射线衍射（XRD）分析物相结构。实验发现：当向ZrN薄膜（18．9GPa）中加入5at％，23at％，47at％和63at％Al后，对应硬度分别是24．5，40．1，17．1和19．1GPa；对应断裂韧性分别是1．47，3．17，1．13和1．58MPa·mns，即23at％A1的薄膜同时具备最高的硬度（40．1GPa）和最高的韧性（3．17MPa·m^-0.5）。XRD表明，5at％和23at％Al固溶到ZrN晶粒中，形成NaCl型面心立方（FCC）结构，而47at％和63at％Al则形成纤锌矿密排六方（HCP）A1N第二相。采用两种方法定量地评价了薄膜的韧性。

英文摘要：

ZrAlN thin films containing variable amounts of aluminum, namely 5, 23, 47 and 63at%, were deposited onto TC6 and Si wafers by magnetron sputtering in an argon/nitrogen gas mixture. The ZrAIN coatings were characterized with Field Emission Gun Scanning Electron Microscopy （FESEM） and X-ray Diffraction （XRD）. The plastic deformation of films was analyzed from loading/unloading curves measured by nano-indentation method. The fracture toughness of films were determined by Vicker Indenter Load and Low-Load Impact method. The results show that ZrA1N films possess hardness values of 24.5, 40.1, 17.1 and 19.1 GPa, and fracture toughness values of 1.47, 3.17, 1.13 and 1.58 MPa·m^-0.5, respectively. 23at%ZrAlN possesses highest hardness and toughness. XRD indicates that 5at% and 23at%Al dissolved within ZrN grains forms the NaC1 type face-centered cubic （FCC） structures whereas 47at% and 63at%Al forms wurtzite A1N second phase.