中文摘要：

宽光谱低反射率减反射膜对提高GaAs基多结太阳电池的光电转换效率至关重要。设计和制备了宽光谱TiO_2/Al_2O_3/SiO_2三层减反射膜。理论研究发现,当TiO_2/Al_2O_3/SiO_2三层减反射膜最佳物理厚度为41.74 nm/78.74 nm/94.98 nm时,在350~1 800 nm宽光谱范围内获得最小有效反射率为2.85%。依据理论设计,采用真空电子束蒸发法制备了相应厚度的TiO_2/Al_2O_3/SiO_2三层减反射膜,分光光度计测试结果表明,在350~1 800 nm宽光谱范围内,有效反射率为7.21%,且在485 nm和850 nm波长附近获得反射率极小值4.39%和2.16%。

英文摘要：

The antireflection coatings with low reflectivity in the broadband spectrum are essential to improve the photoelectric conversion efficiency of GaAs-based multi-junction solar cells.The TiO_2/Al_2O_3/SiO_2triple-layer broadband antireflection coating were designed and fabricated.The theoretical results show that when the optimal physical thicknesses of the TiO_2,Al_2O_3 and SiO_2layers of the antireflection coating are 41.74,78.74 and 94.98 nm respectively,the minimum effective reflectivity is 2.85%in the broadband spectrum from350 nm to 1 800 nm.Based on the theoretical design,the TiO_2/Al_2O_3/SiO_2 triple-layer antireflection coating with the same thicknesses was fabricated by the vacuum electron beam evaporation method.The spectrophotometer test results show that the effective reflectivity is 7.21% in the broadband spectrum of 350-1 800 nm,and the minimum reflectivities of 4.39% and 2.16% are obtained around the wavelengths of 485 nm and 850 nm,respectively.