中文摘要：

采用磁过滤直流阴极真空弧源沉积技术在不锈钢基体表面制备了C/C多层复合膜,通过X射线光电子能谱、Raman光谱对薄膜的结构进行表征;C/C多层膜大气下的摩擦损性能在销盘式摩擦磨损试验机上进行;用洛氏压痕法研究了薄膜与基体的结合强度.结果表明：C/C多层复合膜为类金刚石结构.它与SiC球大气下的摩擦系数为0.10左右,其摩损性能由于多层膜的引入而显著提高.Ti过渡层的引入显著提高了膜基结合力.

英文摘要：

C/C multilayers films were grown by filtered cathodic vacuum arc（FCVA） deposition on stainless steel substrates. Its microstructures and mechanical properties were characterized with, X-ray photoelectron spectroscopy（XPS） and Raman spectroscopy, pin-on-disk tribometer and indentation hardness. The results show that the C/C multilayer films display typical diamond-like characteristics with excellent wear resiatance. Its friction coefficient is only 0. 10 when sliding against SiC in ambient air. We found that Ti transtion layer considerably increases the interfacial adhesion.