随着现代科学技术的不断进步,普通硬质涂层和超硬涂层有了显著的发展,部分涂层已经在某些领域实现了应用。主要介绍了氮化物、碳化物、氧化物、硼化物等普通硬质涂层和金刚石、类金刚石(DLC)、cBN、纳米多层结构涂层及纳米复合涂层等超硬涂层的性能、应用、制备技术及其发展趋势,并对部分常见涂层面临的性能改进及其今后可能的发展方向进行了探讨。
As the advancements of modern science and technology, the conventional hard and superhard coatings have achieved remarkable development. Indeed, partial coatings even have been used in some filed. The performance, applications, preparation technique and development tendency of the conventional hard coatings of nitrides, carbides, oxidates and borides have been introduced mainly, as well as superhard coatings of diamond, DLC, cBN, nano multilayer and composite coatings. Moreover, the existing problems regarding to performance improvement and feasible development trend henceforth of the partial common coatings was pointed out.