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Investigation on removal of SU-8 electroplating mould using fuming sulphuric acid
  • ISSN号：0954-4062
  • 期刊名称：Proceedings of the Institution of Mechanical Engin
  • 时间：2011
  • 页码：2277-2282
  • 相关项目：超磁致伸缩固体振子MEMS微陀螺的研究
作者： Shao, D. D.|Cui, F.|Chen, W. Y.|Zhang, W. P.|
同期刊论文项目
超磁致伸缩固体振子MEMS微陀螺的研究
期刊论文 6 会议论文 1 专利 2
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