中文摘要：

以纯甲烷为反应气体，采用等离子增强化学气相沉积技术通过改变沉积气压在316L不锈钢表面制备了一系列的类金刚石薄膜。薄膜结构、机械性能和摩擦学性能分别通过拉曼光谱仪（Raman）、纳米压痕仪（Nano—indententor Ⅱ）和往复球盘摩擦磨损试验仪获得。研究结果表明，随着沉积气压从7Pa增加到15Pa，薄膜的sp^3含量和机械性能明显增加，而摩擦学性能显著降低。随着沉积气压从15Pa增加到31Pa，薄膜的sp^3含量和机械性能明显降低，而摩擦学性能却显著增加。

英文摘要：

The diamond-like carbon （DLC） films were prepared by plasma-enhanced chemical vapor deposition （PECVD） with CH4 as the gas at different working pressure, on substrates of 316L stainless steel. The microstructures and properties of the films were characterized with Raman spectroscopy, scanning electron microscopy, nano-indenter and tribo-test. With the increase of working pressure from 7 Pa to 15 Pa, the sp3 content and mechanical properties of the films increased and the tribological properties decreased obviously. However, with the increase of working pressure from 15 Pa to 31 Pa, the sp3 content and mechanical properties of the films decreased and the tribological properties increased obviously.