中文摘要：

我们采用脉冲激光沉积法,在SrTiO3（001）衬底上以La0.7Sr0.3MnO3作为底电极,制备得单相的0.95（Na0.49K0.49Li0.02）（Nb0.8Ta0.2）-0.05CaZrO3外延薄膜.采用X射线衍射、X射线光电子能谱,电滞回线和介电常数测试分别表征了LKNNT-CZ薄膜的微观结构、表面元素价态和铁电/介电性能.结果表明：（1）制备得到的LKNNT-CZ薄膜的元素组成与靶材相同;（2）在4伏到10伏内均可以获得线型良好且饱和的电滞回线,当驱动电压为10V时,薄膜的剩余极化达到12.4μC/cm2,矫顽电场为102.3kV/cm;（3）薄膜在1kHz频率下的介电常数高达1185.

英文摘要：

Single phase and epitaxial 0. 95（Na0.49K0.49Li0.02）（Nb0.8Ta0.2）-0. 05CaZrO3 （LKNNT-CZ） piezoelectric thin films are successfully fabricated on La0. 7 Sr0. 3 MnO3 coated SrTiO3 （001） substrates by pulsed laser deposition. The microstructures, surfaces, ferroelectrie and dielectric properties are intensively investigated with high-resolution X-ray diffraction （XRD）, X-ray photoelectron spectra （XPS）, P-E loops and dielectric constant measurements. It is found the epitaxial LKNNT-CZ films show well saturated ferroelectrie hysteresises with the drive voltage ranging from 4 V to 10 V. The film contains a typical dielectric constant of 1185 at 1 kHz, a remnant polarization （P,） of 12. 4 μC/cm^2 and a coercive field （Ec） of 102. 3 kV/em under 10 V.