中文摘要：

采用磁控溅射技术在Si衬底上沉积Si/[Fe（10 nm）/Nb（4 nm）/Fe（4 nm）/Nb（4 nm）]2/ [Fe（4nm）/Nb（4 nm）]4多层膜。用2 MeV的Xe离子在室温下辐照多层膜。采用俄歇深度剖析、X射线衍射和振动样品磁强计分析辐照引起的多层膜元素分布、结构及磁性变化。AES深度剖析谱显示当辐照注量达到1 .0×10^14ions/cm2时,多层膜界面两侧元素开始混合;当辐照注量达到2 .0×1016ions/cm2时,多层膜层状结构消失,Fe层与Nb层几乎完全混合。XRD谱显示,当辐照注量达到1 .0×1014ions/cm2时, Nb的衍射峰和Fe的各衍射峰的峰位相对于标准卡片向小角方向偏移,这说明辐照引起Nb基和Fe基FeNb固溶体相的形成;当辐照注量大于1 .0×1015ions/cm2时,辐照引起非晶相的出现。VSM测试显示,多层膜的磁性随着结构的变化而变化。在此实验基础上,对离子辐照引起界面混合现象的机理进行了探讨。

英文摘要：

The behavior of the metallic multilayers of Si/／[Fe（10 nm）/Nb（4 nm）/Fe（4 nm）/Nb（4 nm）／]2/／[Fe（4 nm）/Nb（4 nm）／]4 under 2 MeV Xe-ion irradiation has been investigated by depth profile analysis of Auger electron spectroscopy,X-ray diffraction and vibrating sample magnetometer.The obtained experimental results show that the inter-mixing between Fe and Nb layers occurs in the 1.0×1014 ions/cm2 irradiated multilayer sample which results in the formation of Nb-based and Fe-based FeNb solid solution. For the samples irradiated to fluence larger than 1.0×10^14 ions/cm2 , amorphisation is observed, and moreover, the layered structure of the multilayer samples is broken up completely for the samples under 1.0×10^16 or 2.0×10^14 ions/cm2 irradia- tion. Vibrating sample magnetometer measurement also reveals that the magnetization of the sam- ples changes with the evolution of the structure of multilayers. Possible mechanism of the modifi- cation in Fe/Nb multilayers induced by Xe-ion irradiation is briefly discussed.