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Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased elec
  • ISSN号：1070-664X
  • 期刊名称：Physics of Plasmas
  • 时间：0
  • 页码：123502-1-123502-8
  • 语言：英文
  • 相关项目：双频电容耦合放电等离子体流体动力学数值模拟
作者： Wang, YN|Dai, ZL|Guan, ZQ|
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