中文摘要：

采用离子注入结合低温离子渗硫法制备了Mo S2/Fe S复合薄膜,并借助扫描电子显微镜、X射线光电子能谱仪和纳米压痕仪对复合薄膜进行了表征。结果表明,复合薄膜呈微球结构,颗粒尺寸均匀,约为500 nm。复合薄膜主要由Mo S2、Fe S及少量的氧化物组成。基体与复合薄膜的硬度分别为6.57 GPa和7.89 GPa,弹性模量分别为223.8 GPa和246.2 GPa。相对基体复合薄膜的硬度及弹性模量分别提高约20%和10%,弹性特征值H/E亦相应提高了约10%,表明其较基体具有更高的磨损抗力。

英文摘要：

Ion implantation technology together with low temperature ion sulfurizing technique were used to prepare the Mo S2/ Fe S composite film. The as-prepared film was characterized by scanning electron microscope,X-ray photoelectron spectroscopy and nano indenter. The elastic modulus and hardness of the substrate and Mo S2/ Fe S film were measured by nanoindentation. The results show that the composite film has a microspheric structure with uniform particle diameter approximating 500 nm. The composite film mainly consists of Mo S2,Fe S and a small amount of oxides. The hardness of the substrate and the composite film are 6. 57 GPa and 7. 89 GPa,respectively,and the elastic modulus are 223. 8 GPa and 246. 2 GPa,respectively. The hardness and elastic modulus of the composite film increases by 20% and 10%,respectively,referenced to those of the substrate. The elastic characteristic value H / E also increases about 10%. As a result,the corresponding wear resistance of the composite film is better than the substrate.