采用磁控溅射法制备了Ti N薄膜,研究了其与激光表面织构的摩擦学协同效应,并基于磨损表面分析,探讨了其减摩抗磨机理。结果表明:Ti N薄膜与表面织构具有优异的协同抗磨作用,但减摩作用不明显。织构化Ti N薄膜的磨损率相对于原始Ti N薄膜降低约20%。表面织构因"机械捕捉效应"和"微存储效应"降低Ti N薄膜磨损表面的物质损失,磨损机理为氧化磨损和磨粒磨损。
The Ti N thin film was prepared by magnetron sputtering process. The synergistic effect of the as-prepared film and the laser surface texture on tribological performance was investigated. The mechanism for friction reduction and wear resistance was discussed based on the analysis of the worn surface. The results show that the titanium nitride and surface texture have excellent synergistic effects on the wear resistance,while on the friction reduction it is not obvious. The wear rate of the textured titanium nitride film decreases by 20% referenced to that of the virgin titanium film due to the mechanical entrapment and micro-reservoir effect of the surface texture. The corresponding mechanisms are oxidation wear and abrasive wear.