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Grayscale photomask fabricated by laser direct writing in metallic nano-films
  • ISSN号：1094-4087
  • 期刊名称：Optics Express
  • 时间：0
  • 页码：19981-19987
  • 语言：英文
  • 相关项目：全新纳米无掩模光刻研究
作者： Fang, Ying|Zhao, Zhensheng|Wang, Yongsheng|Xu, Wendong|Zhang, Jianming|Guo, Chuan Fei|Cao, Sihai|Fan, Yongtao|Jiang, Peng|Liu, Qian|
同期刊论文项目
全新纳米无掩模光刻研究
期刊论文 10 会议论文 3
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