中文摘要：

为准确测量平行双关节坐标测量机零件弹性变形量,从而对由此引起的测量误差进行补偿,进一步提高平行双关节坐标测量机测量精度和可靠性,介绍了一种基于PSD位移检测的杆件微变形测量方法,通过激光参考光束将变形量的测量转化为位移量的测量。以FPGA为核心搭建信号转换、采集及传输电路。在Lab VIEW环境编写上位机软件分析测量数据。使用ANSYS软件进行力学仿真分析提出测量系统应具备的精度指标及测量范围。使用激光干涉仪标定系统响应特性,通过2D等电压间隔输出实验测定PSD有效面积内的位移响应矩阵,采用2D双三次样条插值法修正系统响应的非线性误差。实验证实系统可实现1.32μm（2σ）的位移测量精度。可用于平行双关节坐标测量机杆件变形测量,且其安装尺寸较小,可以实现在线检测。

英文摘要：

To accurately measure the elastic deformation of parallel double-joint coordinate measuring machine（ PDCMM） parts,thus to compensate the result,and for further improving of the accuracy and reliability of PDCMM,this paper introduces a rod microdistortion measurement method based on PSD displacement detection. A laser reference beam is used to transform the measurement of deformation into displacement. A FPGA based circuit is designed for signal conversion,data acquisition and transmission. A PC software is designed with Lab VIEW to analyze the data. The precision index and the measurement range is proposed by simulation analysis with ANSYS software. A laser interferometer calibration system is used to determine response characteristics and other system parameters. The displacement response matrix in the effective area of PSD is determined by 2D equal voltage output experiment,and the nonlinear error of the system responses can be corrected by 2D bicubic spline interpolation algorithm. The displacement measurement accuracy is provided to be 1. 32 μm（ 2σ）,which is sufficient for measurement of deformation of PDCMM. Since the small size of the installation part,it is available for online measurement.