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Fabrication method of double-slit-grating for high resolution microspectrometers
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：2012.10.10
  • 页码：147-150
  • 相关项目：一种OLED彩色滤波器超分辨纳米孔阵列光刻技术
作者： Zhang, Zhiyou|Zhang, Yukun|Li, Shuhong|Du, Jinglei|Gao, Fuhua|Shi, Ruiying|Yang, Bangcheng|
同期刊论文项目
一种OLED彩色滤波器超分辨纳米孔阵列光刻技术
期刊论文 19 会议论文 2
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