欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
在深入了解半导体制造过程的基础上,为了有效分析半导体生产线调度与控制性能,提出了有色赋时Petri网的半导体生产线建模方法。该模型,根据生产线所存在主要调度子问题及其之间的相互关系,将半导体生产线划分为投料控制模块、路径调度模块和工件调度模块,这样可以有效降低模型的复杂性和提高模型的可重用性。建立以一个拥有3个工作中心、6台设备的半导体生产线Petri网模型,并对模型进行分析。最后指出了下一步的工作目标。
英文摘要：
In order to effectively analyze of control and scheduling strategies for semiconductor wafer fabrication, a colored timed Petri net （CTPN） modeling technology based on the comprehensive analysis of the semiconductor manufacturing process was proposed. According to the existing relationship between sub-scheduling main problems of wafer fabrication, Hierarchical control based semiconductor wafer fabrication was divided into release control module, routing scheduling module and lot scheduling module so as to reduce complexity and improve reused of the model. Then, a Petri net model representing a re-entrant line with three work centers and six machines is presented, and the analysis for this model is provided. At the end, the aim of next-step work is put-forward.
同期刊论文项目
同项目期刊论文
Swarm based approximate dynamic optimization process for discrete particle swarm optimization system
ACO-based Multi-objective Scheduling of Parallel Batch Processing Machines with Advanced Process Con
期刊信息
位置：