半导体生产重调度策略重点解决重调度的判定和重调度方法的选择,鉴于这两类问题中都涉及到大量随机和不确定因素,提出一种基于模糊Petri网模型的模糊推理方法。首先定义了由七类元素构成的面向重调度策略判定的模糊Petri网模型,继而详细讨论了基于该模糊Petri网模型的模糊推理过程。最后,以实际半导体生产线为背景,针对因设备故障引发的重调度问题,运用文中所提出的方法进行推理,说明了该方法的可行性。
Rescheduling strategy of semiconductor manufacturing emphasized on two aspects: rescheduling judgment and rescheduling method selection. Since large amount of stochastic and uncertain factors were involved in these two problems, a fuzzy reasoning methodology based on fuzzy Petri nets was proposed. After a Fuzzy Petri Net model oriented to Rescheduling Strategy (FPN-RS) structured by seven elements was defined, the reasoning methodology based on FPN RS were discussed. Finally, the application and feasibility of the proposed FPN-RS model and modelbased reasoning methodology were illustrated by a case study of practical semiconductor manufacturing.