以溶胶-凝胶法制备的SnO2纳米材料为基体,采用CuO和WO3作为掺杂剂,研制出甲苯传感器.结果表明:CuO和WO3的掺杂可以明显提高元件对甲苯的灵敏度以及元件的稳定性.当工作温度为175℃,甲苯浓度在30×10^-6体积分数时,元件表现出3倍的灵敏度.在为期90天的追踪实验中发现元件的灵敏度的变化小于10%,元件在甲苯浓度为100×10^-6时的响应恢复时间分别为5S和12s.
This toluene sensor is based on the SnO2 nano-powder prepared by sol- gel method mixed with CuO and WO3 The results show that the doping of CuO and WO3 can obviously improve the sensitivity and stability of the sensor to the toluene. When operating temperature is 175℃, toluene concentration is 30×10^-6, the sensitivity of the sensor reaches to 3 times better. The change of the sensitivity of the element is found to be within 10% in the 90 days. And, the response and recover time of the sensor to 100×10^-6 toluene gas is 5 s and 12 s, respectively.