中文摘要：

针对直线驱动系统，提出一种新的加速度前馈控制策略及前馈质量与电机常数的校准算法。首先，对传统前馈控制与新的控制策略之优缺点进行了对比，又介绍了直线驱动中的运动控制系统，提出一种精确计算前馈质量与电机常数的校准算法，以补偿传统前馈控制中的不足。实例证明该前馈策略与校准算法能有效提高系统的动态和稳态性能，满足高速、高精度的运动要求。该算法已成功应用于以直线驱动为主导的半导体加工设备中。

英文摘要：

A novel acceleration feedforward control strategy and a calibration algorithm on feedforward mass and motor constant were proposed for linear driving system. First, a comparison was done between the conventional feedforward control and the novel one about the advantages and disadvantages. Then, a motion control system for linear driving was described. And a calibration algorithm on feedforward mass and motor constant was proposed to compensate the disadvantages in conventional feedforward control. Experimental re- sults demonstrate that this algorithm can enhance the dynamic response and steady characteristic to satisfy the requirements of high velocity and high precision. This algorithm has already been applied in semiconductor manufacturing equipments supported by linear driving.