中文摘要：

利用对称金属包覆波导中超高阶导模对入射角度高度灵敏的特性,提出了一种新型的实时高精度微位移测量方法.与将压电材料置于导波层中不同,该方法是在压电材料上粘合一平面镜,并放置于一凸透镜的焦平面处.当对压电材料加载电压而产生微位移时,经凸透镜返回的2条边缘光线会产生微小的入射角度变化,从而引起反射光强的急剧改变.该方法的微位移测量精度和测量范围分别为0.5和170nm,且具有结构简单、实时测量等优点,可应用于微机电系统和精密控制领域.

英文摘要：

Based on the ultra-high order mode with high-sensitivity to the variance of incidence angle in the symmetry metal-cladding waveguide, a real-time and high-precision micro-displacement measurement method has been theoretically analyzed and experimentally demonstrated. It is guiding layer but connected with one mirror, and that the shown that the piezoelectric material is not placed in the combination of piezoelectric material and mirror is located at the focal plane of one convex lens. In particular,when a voltage is applied to the piezoelectric material, the resulted micro-displacement will give rise to a tiny variance of incidence angle in the light coming back from the convex tens, and then a sharp change in the reflected light intensity will be obtained. Thre experiment shows that the microdisplacement measurement resolution is 0.5 nm and the measurement range is 170 nm, and furthermore, this scheme is of simple structure, real-time measurement and may be of potential application in micro-electro-mechanical systems and fine control area.