中文摘要：

基于He泡生长的迁移-合并机理,用Monte Carlo方法模拟了对材料进行等温退火过程中He深度分布的演化,探讨了不同参数对这一演化的影响.研究表明：材料中He泡的初始浓度和尺寸将影响He深度分布的变化,而退火温度则对演化速率起重要作用但对最终的He深度分布影响较小;随着反应的进行,整个系统的演化是逐渐趋缓的.

英文摘要：

Based on the migration-coalescence mechanism for helium bubble growth in a material, the evolution of helium depth distribution during annealing is simulated by the Monte Carlo method. The factors that influence the evolution are studied. The results show that the initial concentration and radius of the helium bubble can affect the evolution of He depth distribution, while the annealing temperature has influence only on the evolution rate but little on the final depth distribution of helium. It is also shown that the evolution of the system turns to slow down gradually with the annealing time going.