中文摘要：

针对现有磁场式直线时栅位移传感器行波磁场产生过程中,齿槽的存在影响行波磁场的匀速性,提出基于平面线圈线阵的直线时栅位移传感器。无齿槽的结构形式提高了行波磁场的匀速性,可实现大极距下的高精度测量。传感器将施加正交信号的两相励磁线圈相间排列形成平面线圈线阵,产生的行波磁场通过磁场拾取线圈感应出电行波信号,处理后得到位移量。通过电磁场分析软件对传感器进行建模仿真,根据仿真结果得到测量误差;通过理论分析对测量误差进行分析溯源,并根据分析结果对传感器结构进行优化。基于分析和优化结果研制出传感器样机,并进行了精度实验。实验表明,传感器在240 mm内测量精度为±1μm,实现了精密测量。

英文摘要：

Aiming at the problem that in the generation process of travelling magnetic field in existing magnetic field linear time grating displacement sensor,the tooth and slot influence the velocity uniformity of travelling magnetic field,this paper proposes a linear time grating displacement sensor based on linear array of planar coils. The sensor structure without tooth and slot improves the velocity uniformity,can realize the high precision measurement under large polar distance. In the sensor,two phase exciting coils exerted with orthogonal signals are arranged alternately to form a linear array of planar coils,the generated travelling magnetic field is acquired by the pick-up coils to obtain electric travelling signal,and the displacement quantity is obtained after signal processing. The magnetic field finite element analysis software is used to conduct modeling simulation on the sensor,the measurement error is acquired from the simulation results; the measurement error is analyzed and traced through theoretical analysis,and the sensor structure is optimized based on the analysis result. A sensor prototype was developed according to the analysis and optimization results,and the accuracy experiment was conducted. The experiment results show that the measurement accuracy of the sensor is ± 1 μm in the range of 240 mm,and high precision measurement is achieved.