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中文摘要：
基于正弦函数和快速傅里叶变换提出了一种误差补偿及参数辨识方法,用于提高时栅角位移传感器的测量精度和标定效率。使用激光干涉仪对时栅角位移传感器的误差进行标定,在整周采样36个对极点和对极内采样240个点。通过对标定的误差数据进行分析,由此提出一种基于傅里叶级数变换的误差补偿模型,在对极点对8个参数与对极内20个参数分别进行参数辨识。实验结果表明：补偿后时栅角位移传感器的测量误差减小为原误差的1/38.4,显著地提高传感器的测量精度和标定的效率。
英文摘要：
An error compensation and parameter identification method based on sine function and Fast Fourier Transform （FFT） was presented to improve the measurement accuracy and the efficiency of calibration of time grating angle displacement sen- sors.The measurement errors of the sensors were calibrated by laser interferometer.It was to sample 36 pole points in the whole cir- cular and 240 points with in poles. By analyzing the calibration data, it was presented an error compensation model based on Fast Fourier Transform.The undetermined parameters, 8 on poles and 20 within poles, are identified by the Fourier transform.The experi- mental results show that the errors of the time grating angle displacement sensors were reduced 38.4 times after compensation.The measurement accuracy and the efficiency of calibration of time graiing angle displacement sensor were greatly improved by applying the new method.
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