为了提升时栅位移传感器产品的市场应用空间,时栅位移传感器需要实现绝对式测量功能。提出一种多对极组合的传感器设计方法,通过该方法实现了时栅位移传感器的绝对式测量。通过对时栅位移传感器位移量与信号量关系的解析,阐述了时栅位移传感器的测量机理,并通过系统测试获取了信号量变化规律,验证了该方法与传感器结构的可行性。
Time grating displacement sensor needs to realize absolute measurement in order to improve its application in the market.In this paper, a sensor design method of multiple combination was proposed, and absolute measurement of time grating displacement sensor was realized based on this method.By analyzing the relationship between displacement and ouput of time grat- ing displacement sensor, measurement principle of the sensor was described.Semaphore change rule was obtained through the system test ,verifying the feasibility of this method and sensor structure.