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A run-to-run control algorithm based on timely and delayed mixed-resolution information
ISSN号:0020-7543
期刊名称:International Journal of Production Research
时间:2013.8.8
页码:4704-4717
相关项目:半导体制造中的高级统计过程控制算法研究
作者:
Wang, Kaibo|Lin, Jing|
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半导体制造中的高级统计过程控制算法研究
期刊论文 11
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