欢迎您!
东篱公司
退出
申报数据库
申报指南
立项数据库
成果数据库
期刊论文
会议论文
著 作
专 利
项目获奖数据库
位置:
成果数据库
>
期刊
> 期刊详情页
A Variable-Selection-Based Multivariate EWMA Chart for Process Monitoring and Diagnosis
ISSN号:0022-4065
期刊名称:Journal of Quality Technology
时间:2012.7.7
页码:209-230
相关项目:半导体制造中的高级统计过程控制算法研究
作者:
Jiang, Wei|Wang, Kaibo|Tsung, Fugee|
同期刊论文项目
半导体制造中的高级统计过程控制算法研究
期刊论文 11
同项目期刊论文
A Mixed-Effect Model for Analyzing Experiments with Multistage Processes
A run-to-run control algorithm based on timely and delayed mixed-resolution information
A batch-based run-to-run process control scheme for semiconductor manufacturing
Coordination and control of batch-based multistage processes
A Hierarchical Model for Characterizing Spatial Wafer Variations
A Run-to-Run Profile Control Algorithm for Improving the Flatness of Nano-Scale Products
Process Adjustment with an Asymmetric Quality Loss Function
Optimal Setup Adjustment and Control Of A Process Under ARMA Disturbances
Monitoring the Covariance Matrix via Penalized Likelihood Estimation