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A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error
  • ISSN号：0018-9456
  • 期刊名称：IEEE Transactions on Instrumentation and Measureme
  • 时间：2013.2
  • 页码：483-494
  • 相关项目：全局任务坐标系下的平面电机快速大曲率轮廓运动控制研究
作者： Hu, Chuxiong|Zhu, Yu|Hu, Jinchun|Xu, Dengfeng|Zhang, Ming|
同期刊论文项目
全局任务坐标系下的平面电机快速大曲率轮廓运动控制研究
期刊论文 12 会议论文 3
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