中文摘要：

为了更全面地了解微机电系统（MEMS，Micro．Electro-Mechanical Systems）陀螺仪的随机漂移误差随时间变化的特性，利用动态Allan方差分析法对MEMS陀螺仪输出信号特性进行了全面分析．首先介绍了Allan方差和动态Allan方差分析法原理，然后分别利用Allan方差分析法和动态Allan方差分析法对MEMS陀螺仪的实测数据进行了特性研究与性能分析，研究结果表明：速率斜坡、量化噪声和速率随机游走是MEMS陀螺的主要随机噪声，并且MEMS陀螺的随机漂移具有随时间变化的不稳定性，动态Allan方差不仅可以分离和辨识出MEMS陀螺的主要随机误差源，而且可以跟踪和描述信号随时间变化的稳定性，因此动态Allan方差较经典Allan方差分析法能够更全面地表征MEMS陀螺仪的性能。

英文摘要：

In order to comprehensively understand the characteristics of random drift error of micro-elec- tro-mechanical systems （MEMS） lyze the property of output signal gyroscope varying with time, the of MEMS gyroscopes. Firstly, the dynamic Allan variance was utilized to ana- theory of Allan variance and dynamic Allan variance were introduced. Then, the Allan variance and the dynamic Allan variance were utilized to analyze the characteristic and performance of the practical testing date of MEMS gyroscopes respectively. The study re- suits show that the main random noise of MEMS gyroscope are the rate ramp, quantization noise and the rate random walk, and they are unstability varying with time. The dynamic Allan variance was utilized to not only extract and confirm some main noises of MEMS gyroscope, but also track and describe the stability of MEME gyroscope＇s signal varying with time. Consequently, compared with Allan variance, the dynamic Allan vari- ance can represent the characterization of stochastic errors in MEMS gyroscope more comprehensively.