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中文摘要：
采用一种改进的液相成膜技术——连续离子层吸附与反应（SILAR）法，用锌氨络离子[Zn（NH3）4]^2＋溶液作为独立的前驱体溶液，以载玻片为衬底，在（125±5）℃的温度下沉积出致密、透明的ZnO薄膜。分别用冷场发射型扫描电镜（FESEM）和X射线衍射（XRD）分析了薄膜样品的表面形貌和结晶状态，用紫外-可见分光光度计（UV—Vis spectroscopy）研究了薄膜样品的发光性能。结果表明：获得样品为六角纤锌矿结构的多晶薄膜材料沿[002]方向择优生长；样品表面均匀、致密，厚度约为550nm；在可见光波段具有高的透射率（〉80％）。
英文摘要：
A modified solution method, successive ionic layer adsorption and reaction（SILAR）, was applied to prepare transparent zinc oxide（ZnO） film on glass substrate at （125±5）℃ in mixed ion precursor solution. The surface morphology and crystallizations of films were analyzed by field emission scanning microscopy（FESEM） and X-ray diffraction（XRD）, respectively. The optical properties of the films were studied by ultraviolet visible（UV-Vis）spectroscopy. The results show that the obtained samples are polycrystalline films of hexagonal wurtzite structure, with the preference of [002] orientation. The as-deposited films exhibit uniform and compact surface morphology, with the film thickness of 550 nm, and have high transmittance in the visible band（〉80%）.
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