中文摘要：

针对由4组直线电动机组合构成的三自由度平面电动机,提出了一种双DSP结构的平面电动机控制器。引入了平面电动机三自由度运动解耦控制策略,并对系统的电流控制算法和位置控制算法进行设计,给出了控制器硬件电路和软件设计方案。进行了平面电动机三自由度同步定位实验,X、Y、θZ方向各自由度稳态误差分别为±10μm、±10μm、±0.1 mrad。实验结果表明控制器能够精确有效地实现平面电动机的三自由度运动控制。

英文摘要：

According to the 3-degree of freedom（DOF） planar motor composed of four linear motors,a planar motor controller baesd on double DSP was proposed.Decoupling control strategy of the 3-DOF motions was introduced and control algorithms of current and position were designed,following the presentation of design schemes of hardware and software.The experiment of 3-DOF（X,Y,θZ） simultaneous positioning was implemented,and steady state errors of 3-DOF were ±10 μm,±10 μm and ±0.1 mrad,respectively.The result of experiment shows that the controller can control 3-DOF motions of the planar motor accurately and effectively.