中文摘要：

在介绍三自由度平面电机的结构和工作原理之后,提出执行器的电磁力方程和平面电机的运动控制方程,推导合外力和执行器水平电磁力的转换方程,提出平面电机的三自由度解耦控制策略。设计三个自由度的位置伺服控制算法,进行单自由度定位和三自由度同时定位实验。平移运动的上升时间为0.1 s,稳态误差为10μm,旋转运动的上升时间为0.07 s,稳态误差为0.1 m rad。实验结果表明：三自由度解耦控制策略可行,系统的动静态特性理想。

英文摘要：

After the structure and working principle of the 3-degree-of-freedom（DOF） planar motor were introduced,the electromagnetic force equations of the actuators and the motion control equations of the planar motor were proposed.The transformation equations between the resultant forces and the horizontal electromagnetic forces of the actuators were derived.The decoupling control strategy of 3-DOF motions was proposed.After the position servo algorithms of 3-DOF motions were designed,the single-DOF positioning and 3-DOF simultaneous positioning experiments were conducted.In translational motions control the rise time was 0.1 s and steady-state error was 10 μm and in rotational motion control the rise time was 0.07 s and steady-state error was 0.1 mrad.The experimental results show that the control strategy of 3-DOF motions is feasible and the dynamic and static performances are satisfying.