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Demagnifying far field focusing spot to deep subwavelength scale by truncated hyperlens for nanolith
  • ISSN号：0749-6036
  • 期刊名称：Superlattices and Microstructures
  • 时间：0
  • 页码：63-69
  • 相关项目：基于电磁波超衍射极限的远场成像光刻研究
作者： Yao, Na|Wang, Changtao|Ren, Guowei|Zhao, Zeyu|Feng, Qin|Luo, Xiangang|
同期刊论文项目
基于电磁波超衍射极限的远场成像光刻研究
期刊论文 33 专利 12
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