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Deep subwavelength photolighography based on surface plasmon polariton resonance with metallic grati
  • ISSN号：2040-8978
  • 期刊名称：Journal of Optics
  • 时间：0
  • 页码：045001-
  • 相关项目：基于电磁波超衍射极限的远场成像光刻研究
作者： Yang, Xuefeng|Fang, Liang|Zeng, Beibei|Wang, Changtao|Feng, Qin|Luo, Xiangang|
同期刊论文项目
基于电磁波超衍射极限的远场成像光刻研究
期刊论文 33 专利 12
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