中文摘要：

为了研制小尺寸、高性能的片上微电感，采用Fe基非晶薄带经退火得到的纳米晶带材作为磁芯材料，并对其高频磁导率进行了测试。对纳米晶磁芯螺线管微电感建立了物理模型，模拟分析了结构参数对微电感性能的影响。结果表明：在1～10MHz频率范围内，所设计的微电感的电感量L在2～12μH，品质因数Q值在1．3－2.3，非常适用于DC－DC变换器等功率电子器件。

英文摘要：

In order to develop small size and high performance on-chip microinductors, the nanocrystalline material was used for magnetic core. The nanocrystalline material was prepared after Fe-based amorphous ribbon was annealed at different temperatures. And the high frequency permeability was measured. Using the physical model, the influences of structure parameters on microinductor performance were simulated. The results show that the inductance and quality factor of the designed microinductor are between 2-12 μH and 1.3-2.3 in the frequency rang of 1-10 MHz, respectively, which reveals very perspective for power electronic devices such as DC-DC converters.