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中文摘要：
二极管激光器泵浦模块输出光束发散角小、指向精度高，但其中的快轴准直（FAC）微透镜装调工艺不能满足大功率模块的应用要求，针对此问题，分析了快轴准直微透镜的光束准直原理，简述了应用FAC透镜时的参数选择和装调问题。通过光学成像方法实时监测二极管激光巴条（bar）的近场像和远场像，对FAC透镜分别进行粗调节和细调节，获得了20个巴条连续输出2kW垂直阵列二极管激光快轴准直光束远场发散角（1／e2）4．4mrad、巴条间准直光束指向精度不大于±1．7mrad的准直效果。最后，结合垂直阵列二极管激光器的封装流程，对影响阵列快轴光束准直效果的因素进行了分析，指出了下一步工艺优化的重点。
英文摘要：
The output beam of diode laser vertical stack has the characteristics of small divergence angle and high pointing accuracy, but the adjustment technology can not meet the requirement of diode laser vertical stack with high-power. Beam collimation mechanism of the fast axis collimation （FAC） microlens was described in this paper, and the parameters chosen for device and adjustments of lens were analyzed. The images of diode laser bar both in the near field and far field were real-time monitored through optical imaging methods to realize coarse and fine adjustments of FAC lens, respectively. The output power of the 20-bar vertical stack was 2 kW, and the far field divergence angle of fast axis collimated beam was 4.4 mrad, with the pointing accuracy among bars of less than ±1.7 mrad. Finally, the monitering precision and the collimation influence factors were analyzed, and the key of optimization was pointed out.
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