中文摘要：

在惯性约束核聚变装置中,为了实现高精度光束焦点位置调整的目的,采用了基于高精度自动调整反射镜进行光束准直引导的方法,进行了理论分析和实验验证,取得了不同驱动方式下电动反射镜的调整精度数据.结果表明：柔性铰链连接直线微位移驱动机构和旋转轴框,能够有效地消除摩擦和间隙等对精度的影响,该电动反射镜能够在±15 mrad的运动范围内实现1μrad激光光束指向调整分辨率,满足了神光-Ⅲ装置的技术要求。这一结果对大型激光器中高精度光束调整系统的设计是有帮助的。

英文摘要：

In inertial confinement fusion （ICF） facilities, a high precision laser alignment apparatus is usually used to focus the laser beams on target with high accuracy. To satisfy the beam adjustment requirements of the SG-III laser facility, one laser alignment apparatus with motorized mirrors is designed and studied theoretically as well as experimentally. It is shown that the pointing accuracy of the laser beam can be achieved by using two deferent types of the motorized mirrors. The linear drive mechanism proposed by connecting the rotation mechanism through flexible hinges can meet the beam directing requirement with an accuracy of 1 brad within ＋ 15 mrad range and has been verified on the SG-III laser facility.