中文摘要：

大气等离子体加工反应过程中，等离子体发生装置的热稳定过程对去除率有直接影响，CF4是化学反应中活性F^＊原子的提供者，O2是重要的辅助气体。为了寻找这三者对大气等离子体加工反应过程的影响规律，采用大气等离子体加工系统进行加工、光谱仪监控等离子体反应过程的活性F^＊原子的光谱变化。实验结果表明，在大气压等离子体加工系统中：热稳定后，活性F^＊原子强度基本不随时间变化；随着CF4含量的增加，F^＊原子谱线轮廓发生了自吸收现象，这说明采用光谱法研究CF4含量对活性F^＊原子含量的影响是不完全准确的；由于O2易和CF4解离的中间产物反应，抑制活性粒子重新组合，因此一定范围内随着02含量增加，活性F^＊原子增加。

英文摘要：

In the reaction of the atmospheric pressure plasma process, the heat stable process of the atmospheric pressure plasma jet has a direct impact on the removal rate, CF4 is the provider of active F^＊ atom, O2 is important auxiliary gas, and they play an important role in the process. In order to research the rule of the concentration of the 3 parameters upon the atmospheric pres-sure plasma processing, the atmospheric pressure plasma jet was used for processing and the spectrometer was used to monitor the changes in the process. The experiment indicates that： when the heat is stable, the concentration of the active F^＊ atom essemially remains unchanged; with increasing the concentration of gas CF^＊, the spectrum of the active F^＊ atom has self-absorp- tion phenomena, so using the atomic emission spectroscopy method to monitor the changes in the concentration of active F^＊ atom generated by CF4 is not completely exact; because O2 can easily react with the dissociation product of CF4, which inhibits the compound of the active F^＊ atom, so in a certain range with increasing the concentration of gas O2, the concentration of the active F^＊ atom becomes strong.