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A flexure-based kinematically decoupled micropositioning stage with a centimeter range dedicated to
ISSN号:1083-4435
期刊名称:IEEE/ASME Transactions on Mechatronics
时间:2015
页码:1-8
相关项目:音圈电机直驱的柔性解耦定位系统动力学特性与控制方法
作者:
Liang C M|Tian Y L|Zhao X Y|Zhang D W|
同期刊论文项目
音圈电机直驱的柔性解耦定位系统动力学特性与控制方法
期刊论文 17
会议论文 1
专利 2
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