中文摘要：

表面粘贴式MEMS应变传感器已被广泛运用于航空航天、汽车工业及土木工程等领域的应变测量和监测中。但由于粘接层的影响,结构的应变并不能全部准确、有效地传递到MEMS应变传感器上,造成传感器的测量值与结构的真实应变之间存在一定误差。为了分析表面粘贴式MEMS应变传感器的应变传递机理,基于剪滞理论建立了MEMS应变传感器的力学分析模型,推导出基体和MEMS应变传感器基底上的应变分布、粘接层中的剪力分布及表征MEMS应变传感器应变传递效果的应变传递率,并与有限元数值模拟结果进行了比较。特别地,具体分析了粘接层及MEMS应变传感器基底的几何参数和物理特性参数对应变传递率的影响。结果表明,金属类粘接材料的应变传递率明显高于有机胶的应变传递率,且粘接层厚度越薄,应变传递效果越好。此外,在制造MEMS应变传感器时,采用厚度较薄的Si或Si C基底能保证较高的应变传递率。

英文摘要：

Surface-bonded MEMS strain sensors have been widely applied to the strain measurement and monitoring in many fields such as aerospace,automotive industry,civil engineering and etc. The MEMS strain sensors are bonded on host structures using adhesives,due to the influence of the adhesive layer,the strain of the structure cannot be fully transferred from the host structure to the strain sensor accurately,which makes certain error exist between the measurement value of the sensor and the real strain of the structure. To analyse the strain transfer mechanism of the surface-bonded MEMS strain sensors,based on the shear lag theory,a mechanical analysis model of the surface-bonded MEMS strain sensor is proposed. The strain distributions of the host structure and the substrate of the MEMS strain sensor,the shear stress distribution in the adhesive layer and the strain transmission rate characterizing the strain transfer effect of the MEMS strain sensor are deduced,and the results are compared with the numerical simulation results of finite element method. In particular,the effects of the geometric parameters and physical characteristic parameters of the adhesive layer and the substrate of the MEMS strain sensor on the strain transmission rate are analysed in detail. The results show that the strain transmission rate of metal adhesive material is higher than that of organic adhesive obviously; and the thinner the adhesive layer is,the better the strain transfer effect is. In addition,while manufacturing MEMS strain sensor,adopting thin Si or Si C substrate can ensure high strain transmission rate.