中文摘要：

报道了W级实用化全固态266 nm紫外激光器的设计和应用.在简单紧凑的平平直腔内,使用声光Q进行调制,通过LD端面抽运Nd：YVO4激光晶体产生平均功率8 W的1064 nm近红外光.采用Ⅱ类临界相位匹配的KTP晶体进行腔内倍频,产生平均功率5 W的532 nm绿光.然后,采用Ⅰ类临界相位匹配CsLiB6O10（CLBO）晶体进行腔外四倍频,产生平均功率1.3 W、脉宽约11 ns和重复频率20 kHz的266 nm紫外激光.用该紫外激光器清洗发光二极管（LED）基板,结果表明：激光器性能稳定,清洗效果良好.

英文摘要：

Using a compact plane-plane linear cavity,a near-infrared beam at 1 064 nm with average output power of 8 W is generated from an acoustic-optic Qswitched diode-end-pumped Nd.. YVO4 laser. By employing the intracavity frequency doubling with a type Ⅱ critically phase-matched KTP crystal,a green beam at 532 um with average output power of 5 W is generated. By extracavity fourth-harmonic generation with a type Ⅰ critically phase-matched CsLiB6 O10 （CLBO） crystal, a UV laser at 266 um with average power of 1.3 W is obtained with a repetition rate of 20 kHz and a pulse width of about 11 ns. This UV laser has been applied to clean the light-emitting-Node（LED） basal board,and the steady operation and perfect cleaning effect are proved.