中文摘要：

利用化学气相沉积（CVD）方法生长出一种新颖的氧化锌（ZnO）微米刺球状结构，并使用该结构制备出一种新型压电应力传感器件。使用半导体特性分析系统（Keithley4200）对器件特性进行测试，结果表明该种器件对所施加的应力高度敏感，开关比高达约60，比目前多数ZnO基压电应力传感器件高出数倍，在应力检测和机电开关等领域有很好的应用前景。

英文摘要：

Novel ZnO micro-thornyballs （TBs） were prepared by chemical vapor deposition （CVD） method. Furthermore, a novel flexible piezoelectric strain sensor based on the thorny balls was fabricated by a simple technique. The characterization of the sensor was tested by semiconductor characterization system （Keithey 4200）. The sensor is highly sensitive to an applied stress and has a high on-off ratio （-60）. The rusults showed that the sensor is expected to have potential applications in detection of external mechanical force, as well as electromechanical switch.