中文摘要：

通过在硅微接触表面上涂覆低表面能的憎水性OTS膜以除去接触面间的表面张力，把两表面均接地以除去接触面间的静电力，研究了仅有范德华力作用时硅微结构接触表面的粘附．根据实际粗糙表面凸峰自相似的高度分布．计算了发生粘附后，微观接触表面产生弹性和塑性变形的两种情况下的范德华粘附能，分析了表面形貌对其影响．

英文摘要：

The adhesion of two silicon surfaces were studied under van der Waals forces when other surface forces were eliminated by some techniques. The surfaces were coated with low-surface-energy hydrophobic OTS molecular films to remove capillary forces and were electrically grounded to eliminate electrostatic force between them. Considering the actual self-affine fractal surfaces contact model of two rough surfaces, the adhesion energy between two surfaces under van der Waals forces were calculated after adhesion due to elastic and plastic deformations. Additionally, the effects of surface roughness on the adhesion energy of van der Waals forces were analyzed.