中文摘要：

原子力显微镜（Atomic for cemicroscopy，AFM）是纳米技术和纳米操作领域中最重要的研究工具之一．本文针对扣描成像的原子力显微镜，提出了一种改进的AFM动态成像方法，该方法分析了AFM系统中样品与针尖之间的非线性力对成像精度的影响，通过对扫描过程中获得的成像数据进行融合滤波，有效地提高了快速AFM的成像精度．只体向言，论文首先分析了原子力显微镜当前成像方法存在的主要问题，然后针对和高速扫描或者样品形貌高度有突变时，因AFM系统中非线性因素而引起的成像误差，提出了一种基于临近点集数据融合的改进动态成像方法，以提高AFM对于样品表面形貌的成像精度．最后分别利用原子力显微镜仿真平台数据和实验数据，验证了本文提出的改进成像方法的性能．

英文摘要：

The atomic force microscopy （AFM） is an important tool in the field of nanotechnology and nanomamputation. Based on the filtering and data fusion methods, this paper proposes an innovative imaging method to enhance the imaging precision of AFM along the Z direction. Specifically, this article first introduces the common imaging method utilized by commercial AFMs, then presents an improved dynamic imaging method based on data fusion of neighboring point set to deal with the large imaging error along the Z direction due to the AFM nonlinear characteristics when scanning a highly coarse surface or scanning with a high speed. Finally, some simulation and experimental results are included to demonstrate the superior performance of the proposed imaging method.