中文摘要：

TiN和TiAIN涂层常应用于精冲模，采用XRD技术分析了不同厚度TiN和TiAIN涂层的相变化，并采用Sin^2Ц法测量了TiN涂层和基体以及TiAlN基体的残留应力，应用显微硬度计测量了涂层的显微硬度。结果表明：TiN涂屋（111）和（222）晶面存在明显择优取向，涂层残留应力分布在-2347--1920MPa，基体残留应力分布在-154．9--69．21MPa，均随厚度增加而减小；TiAIN涂层主要相成分为T3A13N2，且（107）晶面存在择优取向，基体残留应力分布在-123．7-469．5MPa，主要呈拉应力状态，且随厚度增加而增大，对模具寿命有较大影响；TiN和TiAIN涂层显微硬度随厚度增加而增大。

英文摘要：

TiN and TiAIN coatings are often used in fime blanking dies. The phase variation of TiN and TiAIN coatings was analyzed by XRD in this research. The residual stress of TiN coating and substrate and TiAIN substrate was measured using sin^2Ц method, and the microhardness of the coating was measured by microhardness tester. The results show that： there is obvious preferred orientation in the crystal surface of TiN coating （111） and （222）, the residual stress of TiN coating ranges from -2 347 MPato-1 920 MPa, and that of the substrate from -154.9 MPa to -69.21MPa, both of which decrease with the increase of coating thickness. The main phase composition of TiAIN coating is ThAhN2 and there is preferred orientation in the crystal surface of （107）. The residual stress of the substrate is between -123.7 MPa to 469.5 MPa, mainly in tensile stress state, which has a large influence on the die life and increases along with the coating thickness. The microhardness of TiN and TiAIN coatings also increases along with the film thickness.