中文摘要：

采用传输矩阵理论和结合悬臂梁的电学一机械模型对GaAs基1．55μm微光电机械系统（MoEMS）波长可调谐滤波器的光学和电学特性进行了深入的对比分析和研究。结果表明，采用800nm厚的空气腔可以实现滤波器波长的调谐范围为100nm，所需最大反向偏压为4V，波长的调谐速率可以达到1．83MHz。

英文摘要：

GaAs-based 1.55μm MOEMS wavelength tunable filters are introduced, and the optical and electromechanical properties are simulated by using matrix transmittance theory and a electric-mechanical model of cantilever. The simulation results show that the tuning range can reach 100 nm for an 800 nm air cavity length. The maximum reverse bias voltage is 4 V, and the tuning speed can reach 1.83 MHz.