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ZnO薄膜的椭圆偏振光谱研究
  • ISSN号：0438-0479
  • 期刊名称：《厦门大学学报：自然科学版》
  • 时间：0
  • 分类：O433.4[机械工程—光学工程;理学—光学;理学—物理]
  • 作者机构：[1]厦门大学物理与机电工程学院,微纳光电子材料与器件教育部工程研究中心,福建省半导体材料及应用重点实验室,福建厦门361005
  • 相关基金：国家自然科学基金重点专项（60827004）;国家自然科学基金项目（60776066）
作者： 张斌恩[1], 李书平[1], 黄斌旺[1], 姜伟[1], 詹华瀚[1], 李孔翌[1], 康俊勇[1]
关键词： 椭圆偏振光谱, ZNO薄膜, 光学常数, 色散模型, spectroscopic ellipsometry, ZnO film, optical constant, dispersion model
中文摘要：

采用椭圆偏振光谱法,在1.50～4.50eV光谱范围内,研究了在蓝宝石衬底上使用分子束外延方法制备的纤锌矿结构ZnO薄膜的光学性质.对椭圆偏振光谱拟合结果表明,坦吉扩展（Tanguy extend）色散公式能更准确、方便地描述ZnO薄膜带边附近的折射率和消光系数的色散关系.提供了ZnO薄膜在1.50～4.50eV光谱范围内的寻常光（o光）和非常光（e光）折射率和消光系数色散关系,为定量分析ZnO薄膜带边附近各向异性的光学性质提供了依据.

英文摘要：

The optical property of wurtzite ZnO film was investigated by spectroscopic ellipsometry（SE） in the spectrum range from 1.50 eV to 4.50 eV.The ZnO film was fabricated by molecular beam epitaxy（MBE） on the sapphire.Tanguy extend dispersion formulas was used to characterize optical property of wurtzite ZnO film.According to the fitting result of SE,Tanguy extend dispersion formulas can well characterize dispersion relation of refractive and extinction index near band edge.The dispersion relation of refractive and extinction index of extraordinary（e） and ordinary（o） was offered,which is the base of quantitative analysis of anisotropic optical character of ZnO film.

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期刊信息
  • 《厦门大学学报：自然科学版》
  • 中国科技核心期刊
  • 主管单位:中华人民共和国教育部
  • 主办单位:厦门大学
  • 主编：谢素原
  • 地址：厦门市思明南路422号厦门大学嘉庚三 817-819室
  • 邮编：361005
  • 邮箱：jxmu@xmu.edu.cn
  • 电话：0592-2180367 2187731
  • 国际标准刊号：ISSN：0438-0479
  • 国内统一刊号：ISSN：35-1070/N
  • 邮发代号:34-8
  • 获奖情况:
  • 多次被评为全国、华东地区、福建省的优秀科技期刊,2001年入选国家新闻出版总署评定的"中国期刊方阵",2003年获国家新闻出版总署颁发的"第二届国家科技...,2006年获国家教育部科技司颁发的"首届中国高校精...
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  • 被引量:16575