中文摘要：

利用纳米压痕载荷-位移曲线计算了直流脉冲磁控溅射镍涂层的硬度、弹性模量和接触刚度。研究了溅射功率和偏压对镍涂层结构和力学性能的影响。结果表明,随溅射功率的增大,镍涂层生长取向均呈无择优生长状态,弹性模量、接触刚度变化不大,硬度先增加后减小。偏压增大会使镍涂层呈现明显的（111）取向生长,接触刚度增大,弹性模量和硬度都先增大后减小。

英文摘要：

The hardness, elastic modulus and contact stiffness of DC magnetron sputtered Ni coatings were calculated based on nano-indentation load-displacement curve. The effects of sputtering power and bias on the structure and mechanical properties of the coating were investigated. The results show that with the increase of sputtering power, the nickel coatings always present no preferential growth, and the elastic modulus and contact stiffness are almost unchanged, but the hardness firstly increases and then decreases. However, the nickel coating presents obvious preferred orientation of （111） with bias increasing, and the contact stiffness increases, and both the elastic modulus and hardness increase firstly and then decrease.