中文摘要：

通过射频磁控溅射法制备了系列Ti Al CN涂层。研究结果表明,通过调节溅射过程中N2流量,Ti Al CN涂层的组成和结构均发生明显变化。很小的N2流量会导致Ti Al CN涂层的晶体结构发生显著变化。随着N2流量的增加,涂层物相组成由fcc-（Ti Al）C相转变为更为复杂的fcc-（Ti Al）（CN）相,同时析出hcp-（Al Ti）（CN）新相。N2流量的进一步增加使得涂层物相最终转变为以hcp-（Al Ti）（CN）为主导的相结构。此外,N2流量还会促进涂层中非晶碳的析出。N2流量为0.5 m L/min时,Ti Al CN涂层由于多相共存,晶粒显著细化,尺寸约为10~20 nm,此时涂层具有较好的力学性能和摩擦学性能。

英文摘要：

The TiAICN coatings were deposited by RF magnetron co-sputtering on substrates of Si（111） and stainless steel. The impact of the synthesis conditions, including but not limited to the N2 flow-rote, thickness of Ti buffer layer and deposition rate, on the phase structures and mechanical properties of the TiA1CN coatings were investigated with X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy, transmission electron microscopy, Raman spectroscopy and conventional mechanical probes. The results show that the N2 flow-rate significantly affects the phase-structures and mechanical properties of the coatings. To be specific,as the N2 flow-rate increased, the fcc-（TiA1）C phase first turned into complicated fcc-（TiA1）（CN）, accompanied by an emerging hcp-（AlTi） （CN）, and finally hcp-（ A1Ti）（CN） phase dominated the coatings. Besides, an increase of N2 flow-rate promoted surface-segregation of amorphous C. Deposited at 0.5 ml/min of N2,the coatings display lower friction coefficient and higher hardness possibly because of the poly-phases and average grain size of 10- 20 nm