微流控技术作为微全分析系统的关键与核心,一直是MEMS领域中的一个研究重点。随着微流控技术水平的不断提高以及与其它学科的不断渗透与融合,近年来已经涌现出一批令人注目的研究热点,其中微流控光学器件就是其典型代表。微流控技术与光学器件的融合,为传统光学器件的微型化、阵列化、低成本化以及高精度控制提供了可能。叙述了一些基于微流控技术的可变焦光透镜、显示器件、光开关、以及可调光纤光栅等新型光学器件的近期研究成果和应用背景。
Microfluidics is the basis of micro total analysis system (μTAS) and the research spotlight in Micro-Electro-Mechanieal Systems (MEMS) now. With the development of microfluidics and the cooperation with other technologies, many new areas, especially microfluidic optical devices, come into being. It is possible that the miniaturization, arraying, low-cost and precise control of the optical devices are realized by the cooperation between microfluidic technology and optical devices. Some typical optical devices and applications are presented, including variable-focusing microlens, display device, optical switch, tunable optical fiber and grating.